THIN-FILM DEPOSITION SYSTEMS

ITN’s Thin-Film Deposition Systems division designs and builds thin-film deposition equipment for research and manufacturing environments. The division offers both standard designs and custom solutions to meet your specific process and throughput requirements. ITN’s proprietary designs include low-cost vacuum deposition chambers for research or prototype production, as well as roll-to-roll vacuum deposition and wet chemical spray deposition production equipment with the capability to operate 1,000-foot rolls of flexible substrates. All of the developed equipment is user friendly, and includes touch-screen controls.

Overcoming one of the major challenges within equipment design and assembly—real time process control—the division utilizes proprietary processes and technologies, enabling real-time, in-line process controls that couple intelligent process control software with a broad variety of sensors. ITN employs a model-based control approach with a fault-tolerant open architecture, particularly suited to complex, dynamic processes. ITN’s experience base includes familiarity with all of the standard equipment sensors such as atomic absorption spectroscopy, optical emission spectroscopy, quartz crystal monitors, and reflectometers. ITN also develops custom sensors, including x-ray fluorescence and parallel detecting spectroscopic ellipsometers, specifically for real-time, in-line measurement of film properties such as thickness, composition, conductivity, surface roughness, and band gap. Using these sensors, ITN successfully implements in-situ, real-time process control of complex thin-film roll-to-roll deposition processes involving more than twelve independent degrees of freedom.

Products and services offered by ITN’s Thin-Film Deposition Systems division include:

Standard Vacuum Systems
In-line load-locked Sputtering Systems
Multi-Target Sputtering Systems
Roll-to-Roll High-Volume Production Systems
PECVD and Thermal Evaporation Systems
Research and Development Systems

Custom Application Systems
In-line Magnetron Sputtering Systems
In-line PECVD Systems
In-line Multi-Process System (PECVD, Sputtering, Thermal Evaporation)
Bell Jar Systems

Thin-Film Process Development
Extensive Thin-Film Research and Development
Clean Room Facilities
Custom Process Development