In support of thin film device characterization and process diagnostics and control, ITN has a full compliment of characterization and test equipment and capability. For example,

• Imaging (morphology/topology) and elemental analysis
  • Scanning Electron Microscope (large stage for 8” dia. Samples)
    • Off-angle imaging for 3-D Imaging
    • w/ Modest Upgrade Could be Used for X-Sectional Imaging
  • Optical Microscopy
  • Energy Dispersive X-ray (composition)
• Film Thickness
  • Profilometry
  • NanoSpec Optical System (n,k)
  • X-Ray Fluorescence
• Electrical/Optical Properties
  • I-V Curve Tracer
  • Spectrum Analyzer for Noise Measurement
  • Quantum Efficiency Measurement
  • Transmission/Reflectance
• Electrochemical Measurements
  • EIS (Electrochemical Impedance Spectroscopy)
  • Cyclic Voltametery
  • Standard I-V (potentiostatic/galvanostatic modes)