 |
||
 |
 |
|
 |
 |
 |
 |
 |
|
|
|
|
|||||||
|
|||||||||
|
|||||||||
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
 |
Models R-3500 and R-4500 R&D Smart Tools are stand-alone thin-film deposition systems that provide compact cost-effective solutions for your process development applications where floor space is limited. The R&D Smart Tools can be customized to provide the following processes: PECVD, Magnetron Sputtering, Physical Vapor Deposition or Thermal Evaporation with RF or DC power supply. These systems are essential tools for any research and development lab with minimal space allocation.
Minimal particulate generation
Multiple process capabilities
Guaranteed process technology
Uniform deposition
Substrate size up to 100cm2
Cooled or heated substrate
Biasable substrate
PECVD / Etching
Sputtering
RF & DC Sputtering
Physical Vapor Deposition
Microelectronics
Photovoltaics
Dielectrics
Opto electrics
Flat panel displays
Model R-3500
Model
R-4500
 |
 |
 |
 |