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Model D-2000 Pilot Production System is a cost-effective solution to your process and equipment needs. System D-2000 is a single chamber - single process machine with the process capability that includes sputtering, PECVD, oo PVD. Model D-2000 gives your company the choice of substrate sizes -- 100cm2 or 1600cm2, or 20cm wide roll-to-roll.
Minimal particulate generation
Multiple process capabilities
Guaranteed process technology
Uniform deposition
PECVD/ Etching
Sputtering
Physical Vapor Deposition
Microelectronics
Photovoltaics
Dielectrics
Opto electrics
Flat panel displays
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