Model M-3000 thin-film deposition machine offers your company a cost-effective solution to deposit a wide variety of materials on a 13" wide flexible substrate. The single chamber design enables convenient front side loading, which minimizes downtime and allows for easy maintenance. The seven internal zones can be configured for heating, cooling, and a variety of processing techniques. The M-3000 is designed for high volume production process on a range of flexible substrates. Choice of processes include PECVD, Sputtering, CVD, Etching, or Thermal Evaporation.


Multiple process capabilities
Up to seven modular processing zones
High production yields
Fully automated controls
Minimal load and unload downtime
Internal cooling / heating plates
Guaranteed process technology


PECVD
Sputtering
CVD
Etching
Thermal Evaporation


Photovoltaics
Food Packaging Industry
Opto electronics
Passivation layers